Mass Flow Controller

Mass Flow Controllers provide precise control of gas or liquid flow rates ensuring stable, accurate performance in critical industrial and laboratory applications.

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Laminar DP mass flow controllers
MC Series
High performance, versatile flow controllers

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Low Pressure drop flow controllers
Whisperâ„¢ MCW Series
Ultra-low pressure drop gas flow controllers

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Coriolis mass flow controllers
CODAâ„¢ KC Series
Gas-independent Coriolis flow controllers

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Intrinsically safe MFCs
IS-Maxâ„¢ ISMC Series
Gas flow control in explosive atmospheres

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Compact Thermal MEMS MFCs
BASISâ„¢ BC Series
Ultra compact flow controllers for OEM
applications

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MFCs for sub‑atmospheric conditions
MCV/SFF sub‑atmospheric controllers
Built for vacuum coating needs: get
pneumatic shut-off or a SEMI footprint

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